Tethis exploits gas-phase technologies for production of nanomaterials and their integration into devices. The focus is both on nanostructured thin films deposition and metal/ceramic nanoparticles synthesis.
Nanostructured thin film deposition is obtained by means of Supersonic Cluster Beam Deposition (SCBD) system fed by two different kind of sources.
Pulsed Microplasma Cluster Source (PMCS) and
FlameBeam source. One of the main features of coatings by cluster beam deposition is the high porous structure making them ideal for applications requiring high specific surface areas. Precision coatings even on heat-sensitive or micromachined substrates (silicon membranes, cantilevers, and MEMS in general) can be realized on surfaces as small as some µm2 or as large as 100 cm2 at a coverage from sub-monolayer to micrometer thickness. The use of contact-free hard masks allows a clean and easy fabrication of patterned films.
Nanoparticles synthesis is obtained by flame process which covers a broad product range of materials (metal-oxides, phosphates, carbonates, noble metals) that form in a high temperature oxidizing environment. A wide range of applications can be found for nanoparticles from catalysis to electronics, from fuel cells to batteries, and also for composite materials (e.g. ceramics) or optics.
For more information about flame processes you can download our technical documents:
- Nanopowders and
Nanostructured Coatings: Technologies and Products
(4,06MB)
